$ 
$$$$ Combo ITF $$$$
$ 
$ Cap Unit: 1e-12 F
$ Res Unit: 1 ohm
$ 
$ 
$$ begin_min_ITF

TECHNOLOGY = scmos
USE_SI_DENSITY = YES
GLOBAL_TEMPERATURE = 25.0
DIELECTRIC PASS6 	 {THICKNESS=0.600000	ER=8.1 } 
DIELECTRIC PASS5b 	 {THICKNESS=0.400000	ER=4.2 } 
DIELECTRIC PASS5a 	 {THICKNESS=1.450000	ER=4.2 } 
CONDUCTOR METALTOP {THICKNESS= 1.450000
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 2.0000 4.0000 6.0000 8.0000 }
         WIDTHS   { 3.0000 6.0000 9.0000 12.0000 15.0000 }
         VALUES  {
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 2.0000 4.0000 6.0000 8.0000 }
         WIDTHS   { 3.0000 6.0000 9.0000 12.0000 15.0000 }
         VALUES  {
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
           }
       }
 WMIN=3 SMIN=2
}
DIELECTRIC PASS4 	 {THICKNESS=0.250000	ER=4.2 } 
DIELECTRIC PASS3 	 {THICKNESS=0.075000	ER=8.1 } 
DIELECTRIC PASS2 	 {THICKNESS=0.400000	ER=4.2 } 
DIELECTRIC PASS1 	 {THICKNESS=0.075000	ER=8.1 } 
DIELECTRIC IMD6d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD6c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD6b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL6 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD6a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD5d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD5c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD5b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL5 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD5a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD4d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD4c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD4b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL4 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD4a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD3d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD3c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD3b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL3 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD3a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD2d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD2c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD2b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL2 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD2a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD1d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD1c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD1b 	 {THICKNESS=0.130000	ER=2.9 } 
DIELECTRIC IMD1a 	 {THICKNESS=0.030000	ER=4.5 } 
DIELECTRIC ILD_A 	 {THICKNESS=0.020000	ER=4.2 } 
CONDUCTOR METAL1 {THICKNESS= 0.180000
    SIDE_TANGENT = 0.069444 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 1.5000 2.0000 2.5000 3.0000 5.0000 }
         WIDTHS   { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0312 0.0304 0.0295 0.0278 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0297 0.0295 0.0287 0.0274 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268
 0.0279 0.0279 0.0275 0.0268 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264
 0.0263 0.0263 0.0263 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262
 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 1.5000 2.0000 2.5000 3.0000 5.0000 }
         WIDTHS   { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.003750 -0.007500 -0.012500 -0.023900 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250
 -0.001250 -0.002250 -0.007500 -0.017250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250
 -0.001250 -0.001250 -0.004000 -0.010600 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250
 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050
 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600
 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150
 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700
 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300
 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300
 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850
 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900
 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900
 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900
 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900
 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950
 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050
           }
       }
 WMIN=0.09 SMIN=0.09 
}
DIELECTRIC ILD_B 	 {THICKNESS=0.170000	ER=4.2 } 
DIELECTRIC ILD_C 	 {THICKNESS=0.100000	ER=4.2 	MEASURED_FROM=FOX_A}
DIELECTRIC LINER	 {THICKNESS=0.02 	ER=7.5 	TW_T=0.02 	SW_T=0.02 	MEASURED_FROM=TOP_OF_CHIP }
DIELECTRIC SPACER	 {THICKNESS=0.0 	ER=6.25 	TW_T=0.0 	SW_T=0.037 	MEASURED_FROM=TOP_OF_CHIP }
DIELECTRIC FOX_A 	 {THICKNESS=0.020000	ER=3.9 }
DIELECTRIC FOX_B 	 {THICKNESS=0.110000	ER=3.9 } 
DIELECTRIC      FOX_C 	 {THICKNESS=0.190000	ER=3.9 } 
VIA VIA6 { FROM=METAL6	TO=METALTOP AREA=0.1 RPV=1.5 }
VIA VIA5 { FROM=METAL5	TO=METAL6 AREA=0.01 RPV=1.5 }
VIA VIA4 { FROM=METAL4	TO=METAL5 AREA=0.01 RPV=1.5 }
VIA VIA3 { FROM=METAL3	TO=METAL4 AREA=0.01 RPV=1.5 }
VIA VIA2 { FROM=METAL2	TO=METAL3 AREA=0.01 RPV=1.5 }
VIA VIA1 { FROM=METAL1	TO=METAL2 AREA=0.01 RPV=1.5 }

$$ end_min_ITF
$ 
$$ begin_max_ITF

TECHNOLOGY = scmos
USE_SI_DENSITY = YES
GLOBAL_TEMPERATURE = 25.0
DIELECTRIC PASS6 	 {THICKNESS=0.600000	ER=8.1 } 
DIELECTRIC PASS5b 	 {THICKNESS=0.400000	ER=4.2 } 
DIELECTRIC PASS5a 	 {THICKNESS=1.450000	ER=4.2 } 
CONDUCTOR METALTOP {THICKNESS= 1.450000
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 2.0000 4.0000 6.0000 8.0000 }
         WIDTHS   { 3.0000 6.0000 9.0000 12.0000 15.0000 }
         VALUES  {
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
 0.0323 0.0323 0.0323 0.0323
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 2.0000 4.0000 6.0000 8.0000 }
         WIDTHS   { 3.0000 6.0000 9.0000 12.0000 15.0000 }
         VALUES  {
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
 -0.088750 -0.088750 -0.088750 -0.088750
           }
       }
 WMIN=3 SMIN=2
}
DIELECTRIC PASS4 	 {THICKNESS=0.250000	ER=4.2 } 
DIELECTRIC PASS3 	 {THICKNESS=0.075000	ER=8.1 } 
DIELECTRIC PASS2 	 {THICKNESS=0.400000	ER=4.2 } 
DIELECTRIC PASS1 	 {THICKNESS=0.075000	ER=8.1 } 
DIELECTRIC IMD6d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD6c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD6b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL6 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD6a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD5d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD5c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD5b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL5 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD5a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD4d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD4c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD4b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL4 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD4a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD3d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD3c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD3b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL3 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD3a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD2d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD2c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD2b 	 {THICKNESS=0.220000	ER=2.9 } 
CONDUCTOR METAL2 {THICKNESS= 0.220000
    SIDE_TANGENT = 0.079545 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0315 0.0305 0.0296 0.0279 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275 0.0275
 0.0293 0.0291 0.0287 0.0276 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271 0.0271
 0.0280 0.0279 0.0279 0.0272 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263 0.0263
 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0240 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228 0.0228
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220 0.0220
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216
 0.0216 0.0216 0.0216 0.0216 0.0216 0.0216 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215
 0.0215 0.0215 0.0215 0.0215 0.0215 0.0215 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214 0.0214
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 2.5000 3.0000 3.5000 5.0000 }
         WIDTHS   { 0.1000 0.1300 0.1500 0.2000 0.3000 0.4000 0.5000 0.6000 0.7000 1.0000 1.5000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.001250 -0.006250 -0.011000 -0.023500 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750 -0.026750
 0.001750 0.000750 -0.002000 -0.011250 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750 -0.015750
 0.002050 0.002050 0.002050 -0.004950 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900 -0.006900
 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850 0.010850
 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200 0.014200
 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750 0.015750
 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000 0.016000
 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000 0.012000
 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500 0.013500
 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500 0.019500
 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500 0.020500
 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000 0.022000
 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500 0.022500
 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000 0.024000
 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150 0.028150
 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200 0.028200
           }
       }
 WMIN=0.1 SMIN=0.1 
}
DIELECTRIC IMD2a 	 {THICKNESS=0.095000	ER=2.9 } 
DIELECTRIC IMD1d 	 {THICKNESS=0.030000	ER=4.2 } 
DIELECTRIC IMD1c 	 {THICKNESS=0.050000	ER=5 } 
DIELECTRIC IMD1b 	 {THICKNESS=0.130000	ER=2.9 } 
DIELECTRIC IMD1a 	 {THICKNESS=0.030000	ER=4.5 } 
DIELECTRIC ILD_A 	 {THICKNESS=0.020000	ER=4.2 } 
CONDUCTOR METAL1 {THICKNESS= 0.180000
    SIDE_TANGENT = 0.069444 
    RHO_VS_WIDTH_AND_SPACING {
         SPACINGS { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 1.5000 2.0000 2.5000 3.0000 5.0000 }
         WIDTHS   { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 0.0312 0.0304 0.0295 0.0278 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270 0.0270
 0.0297 0.0295 0.0287 0.0274 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268 0.0268
 0.0279 0.0279 0.0275 0.0268 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264 0.0264
 0.0263 0.0263 0.0263 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262 0.0262
 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239 0.0239
 0.0228 0.0228 0.0228 0.0228 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227 0.0227
 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221 0.0221
 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0220 0.0220 0.0220 0.0220 0.0220 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218
 0.0219 0.0219 0.0219 0.0219 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
 0.0219 0.0218 0.0218 0.0218 0.0218 0.0218 0.0218 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217 0.0217
           }
       }
    ETCH_VS_WIDTH_AND_SPACING  {
         SPACINGS { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 1.5000 2.0000 2.5000 3.0000 5.0000 }
         WIDTHS   { 0.0900 0.1100 0.1350 0.1800 0.2700 0.3600 0.4500 0.5400 0.6300 0.9000 1.0000 2.0000 3.0000 4.5000 7.5000 12.0000 }
         VALUES  { 
 -0.003750 -0.007500 -0.012500 -0.023900 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250 -0.031250
 -0.001250 -0.002250 -0.007500 -0.017250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250 -0.023250
 -0.001250 -0.001250 -0.004000 -0.010600 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250 -0.015250
 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050 0.005050
 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600 0.005600
 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150 0.006150
 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700 0.006700
 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300 0.007300
 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300 0.012300
 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850 0.014850
 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900 0.014900
 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900
 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900
 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900 0.015900
 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950 0.015950
 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050 0.016050
           }
       }
 WMIN=0.09 SMIN=0.09 
}
DIELECTRIC ILD_B 	 {THICKNESS=0.170000	ER=4.2 } 
DIELECTRIC ILD_C 	 {THICKNESS=0.100000	ER=4.2 	MEASURED_FROM=FOX_A}
DIELECTRIC LINER	 {THICKNESS=0.02 	ER=7.5 	TW_T=0.02 	SW_T=0.02 	MEASURED_FROM=TOP_OF_CHIP }
DIELECTRIC SPACER	 {THICKNESS=0.0 	ER=6.25 	TW_T=0.0 	SW_T=0.037 	MEASURED_FROM=TOP_OF_CHIP }
DIELECTRIC FOX_A 	 {THICKNESS=0.020000	ER=3.9 }
DIELECTRIC FOX_B 	 {THICKNESS=0.110000	ER=3.9 } 
DIELECTRIC      FOX_C 	 {THICKNESS=0.190000	ER=3.9 } 
VIA VIA6 { FROM=METAL6	TO=METALTOP AREA=0.1 RPV=1.5 }
VIA VIA5 { FROM=METAL5	TO=METAL6 AREA=0.01 RPV=1.5 }
VIA VIA4 { FROM=METAL4	TO=METAL5 AREA=0.01 RPV=1.5 }
VIA VIA3 { FROM=METAL3	TO=METAL4 AREA=0.01 RPV=1.5 }
VIA VIA2 { FROM=METAL2	TO=METAL3 AREA=0.01 RPV=1.5 }
VIA VIA1 { FROM=METAL1	TO=METAL2 AREA=0.01 RPV=1.5 }

$$ end_max_ITF
$ 
$$ begin_mapping_file
$ conducting_layers
$ metal1 METAL1
$ metal2 METAL2
$ metal3 METAL3
$ metal4 METAL4
$ metal5 METAL5
$ metal6 METAL6
$ metal7 METALTOP
$ 
$ via_layers
$ via1 VIA1
$ via2 VIA2
$ via3 VIA3
$ via4 VIA4
$ via5 VIA5
$ via6 VIA6
$ 
$$ end_mapping_file
